In situ wear studies of surface micromachined interfaces subject to controlled loading
نویسندگان
چکیده
Friction and wear are major limiting factors for the development and commercial implementation of devices fabricated by surface micromachining techniques. These tribological properties are studied using a polycrystalline silicon nanotractor device, which provides abundant, quantitative information about friction and wear at an actual microelectromechanical system (MEMS) interface. This in situ approach to measuring tribological properties of MEMS, combined with high-resolution atomic force microscope (AFM) images of wear tracks, provides i w ©
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